200mm Wafer Handling > M20X Wafer Isolation Pods    

M20X Series 200 MM Pods
Advanced wafer isolation for 200mm fabs

General Specifications | Ordering Information | Configuration Options | Identification Options | Recommended Wafer Carriers | Key Material Specifications | Literature |

Advanced Wafer Isolation Trends in wafer processing technology have mandated advancements in wafer handling technology to support today’s advanced semiconductor processing facilities. Advanced wafer isolation pods provide wafer isolation, and coupled with advanced wafer transport carriers, offer performance benefits over traditional wafer carriers and storage boxes, including:  • Reliable wafer isolation – in a controlled minienvironment    • Secure wafer protection – from electrostatic discharge, damage and contamination    • Precise equipment operation and wafer access – on process tools and AMHS   The M20X Series 200mm Pod is a component of Silicon Delivery™ Systems and Services – Entegris’ unique materials integrity management solution to cost effectively manage silicon from production to consumption. This offering brings together wafer and device handling systems and services into a customized, coordinated package that works for you.

General Specifications

• Accommodate most 25 and 26 capacity 200mm wafer carriers

• M200 Series for most standard carriers

• M205 Series for wide flange carriers

• Compliant with SEMI^® standard E19

• Top automation flange for OHT systems

• Side rails for PGV and AGV transport

• Side handles for manual handling

• Inert gas purge compatible option

• Compatible with multiple ID options

• Cleaned and cleanroom packaged  

Ordering Information

Provided below are the most popular advanced wafer isolation pods. Pods can also be configured to your specific requirements based on the configuration options detailed below. Contact Entegris for more information.

M200 Series
M200 series pods utilize a standard housing that accommodates most 200mm wafer carriers.

Part Number Housing Automation Flange Side Rails Manual Handles Door Receiver Carrier Wafer Capacity M200-5016 Clear No S style Side Standard 25 M200-5028 Clear Yes S style Side Standard 25 M200-5033 Amber Yes S style Side Standard 25 M200-5046 Clear No S style Side Standard 25 M200-5060 Clear Yes C style Side Narrow 26

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

M205 Series
M205 series pods utilize a larger housing that accommodates wide flange wafer carriers.

Part Number Housing Automation Flange Side Rails Manual Handles Door Receiver Carrier Wafer Capacity M205-5030 Clear No Standard Top Narrow 26

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Configuration Options

Entegris offers a variety of configuration options to customize your advanced wafer isolation pod, including:

Housing

• M200 series standard housing

• M205 series housing for wide flange carriers

• Both housings available in clear or amber  

Automation Flange

• Available with or without top automation flange

• Multiple configurations available  

Side Rails

   M200

• None

• S-side rails (European)

• C-side rails (Asian)

   M205

• None

• Standard  

Manual Handles

   M200

• With or without ergonomic side handles

• Standard handle color black, other colors available

   M205

• With or without ergonomic top handle

• Standard handle color black, other colors available  

Inert Gas Purge

• With or without inert gas purge capability

• Standard without inert gas purge capability  

Door Receiver

• Standard "H" bar door receiver

• Narrow "H" bar door receiver for 200 series carriers

• Wide "H" bar door receiver (Japan)  

Carrier Spring Lock

• Spring lock configuration based on wafer carrier used  

Identification Options

Entegris offers a variety of options for pod identification, including:

• Color coding of the pod housing and manual handles

• Laser marking

• Bar code labels

• Cardholders

• Electronic ID system holders  

Contact Entegris to determine a suitable identification method for your application.

Recommended Wafer Carriers

For optimum performance of your advanced wafer isolation pod, Entegris recommends the use of one of the following advanced wafer transport carriers:

• KA202 Series

• KA250 Series

• KA198 Series

• KA200/A200 Series  

Key Material Specifications

Transparent Polycarbonate

• Low ionic

• Low outgassing

• Excellent clarity

• Used in the pod housing and wafer retainer

Conductive Polycarbonate

• Carbon filled conductive polycarbonate

• Low ionic

• Low outgassing

• Used in the door housing

Thermal Plastic Elastomer

• Low ionic

• Low outgassing

• Used in the door seal

M20X Series Pods

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