150mm Wafer Handling

Entegris' 150 mm wafer carriers and boxes

To support the semiconductor industry's requirements for advanced 150mm wafer handling, Entegris offers a variety of wafer shipping and handling solutions to safely transport silicon wafers in today's 150 mm fabs.

Multiple Wafer Shipping Boxes

Ultrapak^® Series

Single Wafer Shipping Boxes and Trays

H93 Series Shipping Box

Solopak^® Series Shipping Box

H22 Series Shipping Box

H20 Series Tray

Transport Wafer Carriers

194,196,182 Series

Process Wafer Carriers

194, 190, 182 Series

150mm SMIF Pod

SMIF Pod - 150mm

Storage Boxes

E160, E124, E90, E206, H3150 Series

Options and Accessories

Wafer Carrier Handles

Storage Box Accessories

Identification Options

Finished Wafer Shipping

Visit www.devicecare.com for related finished wafer shipping products