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200mm Wafer Handling Systems

Entegris' 200 mm wafer pod

To support the semiconductor industry's requirements for advanced 200mm wafer handling, Entegris offers a wide selection of products and services designed to address the automation, contamination and productivity concerns of today's 200mm fabs.

Single Wafer Shipping Boxes and Trays 
H93 Series Shipping Box 
Solopak® Series Shipping Box 
H20 Series Tray 
 
Storage Boxes and Accessories 
200mm Storage Boxes 
 
Wafer Carriers 
198 Series Wafer Transport Carriers 
20X Series Wafer Transport Carriers 
200 Series Wafer Transport Carriers 
Process Wafer Carriers 
 
Wafer Isolation Pods 
M20X Wafer Isolation Pods 
A200 G4 200 mm SMIF Pod 
 
Wafer Shipping Boxes 
Crystalpak® Wafer Shipping Box 
Ultrapak® Wafer Shipping Box 
Ultrapak® Edge Guard Shipper 
 
Finished Wafer Shipping 
Visit www.devicecare.com for related finished wafer shipping products 
 

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