450 mm Wafer Handling Systems

With over three decades of experience in advanced wafer handling and transport, Entegris is helping to lead the development and commercialization of 450 mm wafer production utilizing our:

extensive applications knowledge
product design expertise
material development capabilities and
industry experience

These form the foundation from which we are building the industry’s highest performing, most comprehensive 450 mm product portfolio.

Wafer Size	Thickness	Weight	10 mm Die/Wafer
100 mm	525 um	10 g	56
200 mm	725 um	53 g	269
300 mm	775 um	125 g	640
450 mm	925 um	342 g	1490

Single Wafer Shippers

450 mm Single Wafer Shipper

Multiple Wafer Shippers

450 mm Multiple Wafer Shippers (FOSB and H-MAC)

Wafer Processing Carriers

450 mm Wafer Processing Carriers (FOUP)

450 mm Wafer Handling Systems

Table of Contents