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Wafer Processing Carriers (FOUP)

450mm Front Opening Unified Pod

450 mm Fab Carrier (FOUP)

The 450 mm FOUP offers 25 capacity and is designed to provide maximum wafer protection throughout the 450 mm wafer processing cycle.

Features and benefits:

  • Designed and built to SEMI informational ballot draft 4770A
  • Compatible with automation for handling of wafers and latching door
  • Internal wafer support developed to minimize wafer sag for automated loading and unloading
  • Accommodates wafer thicknesses based on SEMI proposed standards (925um ±25um)
  • Constructed from leading-edge, engineering grade polymers to eliminate micro contamination and maximize environmental control
  • Innovative, patent pending product design
450mm
            Front Opening Unified Pod