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450 mm Fab Carrier (FOUP)
The 450 mm FOUP offers 25 capacity and is designed to provide maximum wafer protection throughout the 450 mm wafer processing cycle.
Features and benefits:
- Designed and built to SEMI informational ballot draft 4770A
- Compatible with automation for handling of wafers and latching door
- Internal wafer support developed to minimize wafer sag for automated loading and unloading
- Accommodates wafer thicknesses based on SEMI proposed standards (925um ±25um)
- Constructed from leading-edge, engineering grade polymers to eliminate micro contamination and maximize environmental control
- Innovative, patent pending product design
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