150mm Transport Wafer Carriers

194/196 Series

Superior automation performance

A196-60MLB-47C02

High rigidity and dimensional stability
Four-point contact on the "H" bar and track for improved wafer positioning
Open sidewall style
High profile design for maximum wafer protection
Locating track notches for the center of the thirteenth pocket
"H" bar equipment interface
Pins and holes on the top rail
Wafer capacity: 25
D1 dimension: 14.5mm (0.57")
Pocket spacing: 4.8mm (0.19")
Pocket flat: 1.5mm (0.06")

Part Number	End Wall Configuration	"H" Bar End Flanges	Compatible Boxes	Material	Notes
A196-60MLB-47C02	Flanges	Yes	E90, E124, E160, E206, H3150	STAT-PRO^® 3000
A196-60ML-47C02	Flanges	No	E90, E124, E160, E206, H3150	STAT-PRO^® 3000
A196-60MLX-47C02	Flanges, handle	Yes	-	STAT-PRO^® 3000
FA196B-60MLB-7902	Flanges	Yes	E90, E124, E160, E206, H3150	Fluorosentry^®	Allows migration to A196-60MLB-47C02
PA194-60MB-0603	Flanges	Yes	E90, E124, E160, E206, H3150	Blue Polypropylene	Red, green, yellow, orange and natural colors available
PA194-60MB-61C02	Flanges	Yes	E90, E124, E160, E206, H3150	STAT-PRO^® 100

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

182 Series

The industry standard 150mm wafer carrier

KA182-60MB-47C02

High rigidity and dimensional stability
Four-point contact on the "H" bar and track for improved wafer positioning (unless noted)
Open sidewall style
High profile design for maximum wafer protection
Locating track notches for the center of the thirteenth pocket (unless noted)
"H" bar equipment interface
Pins and holes on the top rail
Wafer capacity: 25
D1 dimension: 14.5mm (0.57")
Pocket spacing: 4.8mm (0.19")
Pocket flat: 1.5mm (0.06")

Part Number	End Wall Configuration	"H" Bar End Flanges	Compatible Boxes	Material	Notes
KA182-60MB-47C02	Flanges	No	E90, E124, E160, E206, H3150	STAT-PRO^® 3000	No track notches (version with notches is available - contact Entegris)
FA182-60MB-7902	Flanges	No	E90, E124, E160, E206, H3150	Fluorosentry^®	Allows migration to KA182-60MB-47C02
PA182-60MB-0603	Flanges	No	E90, E124, E160, E206, H3150	Blue Polypropylene	No four-point contact No track notches Allows migration to KA182-60MB-47C02 Red, green, yellow, orange and natural colors available
PA182-60MB-61C02	Flanges	No	E90, E124, E160, E206, H3150	STAT-PRO^® 100	No four-point contact No track notches Allows migration to KA182-60MB-47C02
PA182-60MC-61C02	Flanges, inspection window	No	E90, E124, E160, E206, H3150	STAT-PRO^® 100	No four-point contact No track notches
PA182-60MBN-61C02	Flanges	No	E90, E124, E160, E206, H3150	STAT-PRO^® 100	No four-point contact Allows migration to KA182-60MB-47C02

Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

Entegris Literature

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150 mm Wafer Shipping and Handling Products