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76.2mm (3") Wafer Handling
Single Wafer Shippers
H22 Series
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- Available for 90mm, 3.25" and 3" wafers
- Conical pocket holds one wafer facedown contacting only the wafer’s edges
- Spring retains wafer and minimizes particle generation
- Stackable for efficient use of storage space
- Loose or lock stacking, either tray on tray or cover on tray
- Convenient screw on covers
- Large area on cover provides space for labeling
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| H22-35-0615 |
90mm |
Tray |
Natural polypropylene |
| H22-351-0615 |
Cover |
Natural polypropylene |
| H22-352-0615 |
Spring |
Natural polypropylene |
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| H22-32-0615 |
3.25" |
Tray |
Natural polypropylene |
| H22-321-0615 |
Cover |
Natural polypropylene |
| H22-32-62C02 |
Tray |
STAT-PRO® 150 |
| H22-321-62C02 |
Cover |
STAT-PRO® 150 |
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| H22-30-0615 |
3" |
Tray |
Natural polypropylene |
| H22-301-0615 |
Cover |
Natural polypropylene |
| H22-302A-0615 |
Spring, low force |
Natural polypropylene |
| H22-302-0815 |
Spring |
Low density polyethylene |
| H22-30-62C02 |
Tray |
STAT-PRO® 150 |
| H22-301-62C02 |
Cover |
STAT-PRO® 150 |
| H22-302A-62C02 |
Spring |
STAT-PRO® 150 |
Entegris Literature
Information on these products is also available in PDF format. You will need the Adobe Acrobat Reader from Adobe Systems.
 Specialized Handling Products
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