Miscellaneous Device Carriers

Wafer Baskets

•	For processing and handling substrates
•	Lead time: eight weeks

A89

A89

• Wafer size: 13mm, 30mm, 64mm (0.5" x 1.2" x 2.5") • Overall size: 175mm x 112mm x 43mm (6.9" x 4.4" x 1.7") • Compatible tanks: E23-01 • Compatible handles: A05, A08 • Pocket spacing: 7.11mm (0.28") for gallium arsenide wafers Part Number Description Capacity Material A89-01-0215 Basket 52 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A12

A12

• Wafer size: 13mm to 38mm (0.5" to 1.5") • Overall size: 173mm x 86mm x 30mm (6.8" x 3.4" x 1.2") • Compatible handles: A05, A08 • Carrier inverted serves as cover Part Number Description Capacity Material A12-01-0215 Basket 52 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A47

A47

• Wafer size: 38.1mm to 57.2mm (1.5" to 2.25") • Overall size: 160mm dia. x 51mm (6.3" dia. x 2.0") • Compatible tanks: E14-21-01, E14-25-01 • Compatible handles: A01, A07, A029 • Numbered pockets Part Number Description Capacity Material A47-01-0215 Basket 30 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A23

A23

• Wafer size: 25mm to 51mm (1.0" to 2.0") • Overall size: 132mm x 89mm x 145mm (5.2" x 3.5" x 5.7") • Integral handle • Bottom flow-through: 15.88mm (0.63") • Pocket spacing: 3.18mm (0.13") Part Number Description Capacity Material A23-0215 Basket 50 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A17

A17

• Wafer size: 19mm to 51mm (0.75" to 2.0") • Overall size: 122mm x 89mm x 28mm (4.8" x 3.5" x 1.1") • Compatible handles: A05, A08 • Pocket width: 6.4mm (0.25") Part Number Description Capacity Material A17-01-0215 Basket 20 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A26

A26

• Wafer size: 15.88mm to 51mm (0.625" to 2.0") • Overall size: 152mm dia. x 61mm (6.0" dia. x 2.4") • Compatible tanks: E14-25-01 • Compatible handles: A01, A07, A029 Part Number Description Capacity Material A26-01-0215 Basket 30 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A15

A15

• Wafer size: 25mm to 44.4mm (1.0" to 1.75") • Overall size: 117mm dia. x 46mm (4.6" dia. x 1.8") • Compatible tanks: E12, E14-10-01, E22-101 • Compatible handles: A01, PA01, A07, PA07, A029, PA029 Part Number Description Capacity Material A15-01-0215 Basket 24 PFA A15-02-0215 Cover 24 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A14

A14

• Wafer size: 15.88mm to 31.8mm (0.625" to 1.25") • Overall size: 89mm dia. x 20mm (3.5" dia. x 0.8") • Compatible tanks: E12 • Compatible handles: A01, A07, A029 • A14-01S-61C02 basket minimum order quantity: 4 Part Number Description Capacity Material A14-01S-0215 Basket 24 PFA A14-02S-0215 Cover 24 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.

A13

A13

• Wafer size: 13mm to 28.58mm (0.5" to 1.125") • Overall size: 173mm x 86mm x 23mm (6.8" x 3.4" x 0.9") • Compatible handles: A07, A08 • Carrier inverted serves as cover Part Number Description Capacity Material A13-01-0215 Basket 52 PFA Minimum order quantities may apply. Contact your Entegris Regional Customer Service Center for ordering information.